JPS6141093Y2 - - Google Patents
Info
- Publication number
- JPS6141093Y2 JPS6141093Y2 JP1980013165U JP1316580U JPS6141093Y2 JP S6141093 Y2 JPS6141093 Y2 JP S6141093Y2 JP 1980013165 U JP1980013165 U JP 1980013165U JP 1316580 U JP1316580 U JP 1316580U JP S6141093 Y2 JPS6141093 Y2 JP S6141093Y2
- Authority
- JP
- Japan
- Prior art keywords
- dry plate
- mask dry
- mask
- holding frame
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 238000000576 coating method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 150000001844 chromium Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980013165U JPS6141093Y2 (en]) | 1980-02-04 | 1980-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980013165U JPS6141093Y2 (en]) | 1980-02-04 | 1980-02-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56115155U JPS56115155U (en]) | 1981-09-04 |
| JPS6141093Y2 true JPS6141093Y2 (en]) | 1986-11-22 |
Family
ID=29609709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980013165U Expired JPS6141093Y2 (en]) | 1980-02-04 | 1980-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6141093Y2 (en]) |
-
1980
- 1980-02-04 JP JP1980013165U patent/JPS6141093Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56115155U (en]) | 1981-09-04 |
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